培訓方式以講課和實驗穿插進行
課程描述：
Overview
SENTAURUS WORKBENCH: The class covers the basics of this framework tool that allows organization of parameterized TCAD simulations in a single project with many possible splits, or branches.
SENTAURUS PROCESS: Users will learn the specifics of this process simulation tool, in terms of syntax and introduction of various models to simulate fabrication process flows.
SENTAURUS STRUCTURE EDITOR: The class will show you how to create 2D and 3D device structures, import structures from a prior process simulation step, make boundary simplifications and properly mesh structures for any subsequent device simulations.
SENTAURUS DEVICE: The class covers the basics how to simulate the electrical characteristics of devices created with SENTAURUS PROCESS and/or SENTAURUS STRUCTURE EDITOR.
SENTAURUS VISUAL & INSPECT: Users will be taught how to visualize the structures and results generated from the process and device simulations, using these tools.
- Objectives
- At the end of this workshop the student should be able to:
- Run parameterized process and device simulations
- Visualize simulated doping profiles, structure boundaries and materials, I-V curves and internal device characteristics such as carrier densities, current densities, and electric fields.
- Successfully combine mask layouts and process flows to perform simulations of fabrication processes involving single or multiple semiconductors, insulators and metals.
- Select proper models for the simulation of fabrication processes and electrical behavior of devices
- Properly mesh structures for adequate simulations
- Perform AC analyses of RF parameters
Course Outline
- Unit 1
- Tool Overview
- What is TCAD?
- TCAD Tool Overview
- SENTAURUS WORKBENCH
- Getting Started
- Running a Project
- Creating a New Project
- Building Multiple Experiments
- Miscellaneous Features
- SWB HANDS-ON ? FULL NMOS FLOW SIMULATION
- Process flow
- Re-meshing
- Device simulation
- Parameter extraction
- Process simulation I - SENTAURUS PROCESS
- Getting Started
- 1D Process Simulation
- 2D Process Simulation
- Interface with ICWB
- Unit 2
- Process simulation II - SENTAURUS PROCESS
- Changing Parameters and Models
- Working with a Custom Calibration File
- Working with SENTAURUS PROCESS Advanced Calibration
- Process simulation III - SENTAURUS PROCESS
- SProcess under SWB
- Meshing with MGOALS
- Other topics/Q&A
- Structure editing, Meshing I - SENTAURUS STRUCTURE EDITOR
- Getting Started
- Generating 2D Boundaries
- Generating Doping Profiles
- Generating Meshes
- Scripting and Parameterization
- Structure editing, Meshing II - SENTAURUS STRUCTURE EDITOR
- Three-Dimensional Structures
- Process Emulation Mode
- Unit 3
- Device simulation I - SENTAURUS DEVICE
- SENTAURUS DEVICE Basics
- Quasistationary and Transient simulations
- Parameter file
- Device simulation II - SENTAURUS DEVICE
- Carrier Transport Models
- Mixed-mode SENTAURUS DEVICE
- AC analysis
- Device simulation III - SENTAURUS DEVICE
- Advanced Examples
- Solving convergence problems in SENTAURUS DEVICE
- Q&A
- Visualization tools - INSPECT & SENTAURUS VISUAL
- Visualization of X-Y plots and post processing of results
- Visualization of 2D and 3D structures along with simulation results
- Interactive mode
- Scripting - parameter extraction
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